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Yiping Zhu, Postdoc
Advisor: Paul Wright
Fabrication and Characterization of PZT Thin Film for Energy Harvesting Application
Lead zirconate titanate (PZT) is a well-known piezoelectric material which has outstanding piezoelectric performance. A variety of techniques including pulsed laser deposition (PLD), metal organic chemical vapor deposition (MOCVD), sputtering, and sol-gel methods have been developed to fabricate PZT thin films on silicon substrate. Among these methods, sol-gel method has the advantages of low cost, simple equipments, easy composition control, and low residual stress, which are desired for microsensors and microactuators applications. This research is concerned with the design, fabrication and optimization of PZT sol-gel process on silicon substrate. The fabricated PZT thin films are applied for silicon-based wireless energy harvesting systems. High piezoelectric coefficient, low leakage and good fatigue performance of PZT thin films can significantly improve the efficiency of energy transformation.
Fig. 1: SEM cross-sectional picture of PZT thin film
Fig. 2: d_33 versus applied voltage